Semiconductor and Dimensional Metrology Division Internet-based Surface Metrology Algorithm Testing System
 Internet-based Surface Metrology Algorithm Testing SystemNational Institute of Standards and Technology

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This software system was developed at the National Institute of Standards and Technology by employees of the Federal Government in the course of their official duties. Pursuant to title 17 Section 105 of the United States Code. Data and descriptions of this software system are not subject to copyright protection and are in the public domain. This software system is an experimental system. NIST assumes no responsibility whatsoever for its use by other parties, and makes no guarantees, expressed or implied, about its quality, reliability, or any other characteristic. We would appreciate acknowledgement if the software is used.

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Technical Inquiries: Thomas Brian Renegar
Surface and Nanostructure Metrology Group
Semiconductor and Dimensional Metrology Division
Physical Measurement Laboratory
NIST, 100 Bureau Drive, Stop 8212
Gaithersburg, MD 20899-8212

NIST | PML | Semiconductor and Dimensional Metrology Division

NIST Program Questions: Public Inquiries Unit,
(301) 975-NIST, TTY (301) 975-8295.
NIST, 100 Bureau Drive, Stop 3460, Gaithersburg, MD 20899-3460
Technical Web Site Questions:Thomas Brian Renegar
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NIST is an agency of the: U.S. Department of Commerce

Date Created: July 15, 2002
Last Updated: October 22, 2012