Precision Engineering Division Internet-based Surface Metrology Algorithm Testing System
 Internet-based Surface Metrology Algorithm Testing SystemNational Institute of Standards and Technology

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Publications


Internet-based Surface Metrology Algorithm Testing System  Documents

S. H. Bui, T. V. Vorburger, B. Muralikrishnan, J. Raja, Surface Metrology Software Variability in Two-Dimensional Measurement, Proc. ASPE 2003.

S. H. Bui, T. Brian Renegar, T. V. Vorburger, J. Raja, M. C. Malburg, Internet-based Surface Metrology Algorithm Testing System, 9th Int. Conf on Metrology and Properties Engineering Surfaces, 2003

S. H. Bui, T. Brian Renegar, T. V. Vorburger, Virtual Surface Calibration Database, to appear in XI. International Colloquium on Surfaces, 2004


Internet-based Surface Metrology Algorithm Testing System related Standards References

ISO 5436-2, Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards. Part 2: Software measurement standards, International Organization for Standardization, Geneva, 2001

ISO 4287, Geometrical Product Specifications (GPS) -- Surface texture: Profile method -- Terms, definitions and surface texture parameters, International Organization for Standardization, Geneva, 1997

ISO 4288 , Geometrical Product Specifications (GPS) -- Surface texture: Profile method -- Rules and procedures for the assessment of surface texture, International Organization for Standardization, Geneva, 1996

ISO 11562, Geometrical Product Specifications (GPS) -- Surface texture: Profile method --  Metrological characteristics of phase correct filters, International Organization for Standardization, Geneva, 1996

ISO 3274, Geometrical Product Specifications (GPS) -- Surface texture: Profile method -- Nominal characteristics of contact (stylus) instruments, International Organization for Standardization, Geneva, 1996

Surface Texture (Surface Roughness, Waviness, and Lay), an American National Standard, ASME B46.1-2002, New York, NY


Others

L. Young, R. Krueger-Sehm, B. Spranger, L. Koenders, Reference software for roughness analysis, Proceedings of the EUSPEN 2001, Turin, Italy, p. 500 – 503

F. Sacerdotti, A. Porrino, C. Butler, S. Brinkmann, M. Vermeulen, SCOUT – Surface characterization open-source universal toolbox, Meas. Sci. Technol, 13, 2002, N21-N26

S. H. Bui, V. Gopalan, J. Raja, An Internet-based Surface Texture Information System, International Journal of Machine Tools & Manufacture, 41, Issue 13-14, 2001, p. 2171-2177

S. H. Bui, S. Fu, V. Gopalan, B. Muralikrishnan and J.Raja, An internet based surface & form analysis software system,  Measurement: Journal of the International Measurement Confederation (IMEKO), 2003

K. J. Stout, P. J. Sullivan, W. P. Dong, E. Mainsah, N. Lou, T. Mathia and H. Zahouani, The Development of Methods for The Characterisation of Roughness in Three Dimensions, Report EUR 15178 EN. EC Brussels, 1993  

B. Muralikrishnan, J. Raja, A proposal for a common language for sharing surface texture data, Proc. ASPE 2002, p. 434-437


Y. B. Yuan, T. V. Vorburger, J. F. Song, and T. B. Renegar, A Simplified Realization for the Gaussian Filter in Surface Metrology, X. International Colloquium on Surfaces, Chemnitz, Germany, 2000

C. Temperton, Self-sorting mixed-radix fast fourier transforms, Journal of Computational Physics, 52(1):1-23, 1983

X. Liu, advanced techniques for separation of roughness, waviness and form, Ph.D. Dissertation, University of North Carolina at Charlotte, Charlotte, North Carolina, 1999

R. K Leach and P. M. Harris, Ambiguities in the definition of spacing parameters for surface-texture characterization, Measurement Science and Technology, 13, 2002, p. 1924-1930

E. Marx, I. Malik, Y. E. Strausser, T. Bristow, M. Poduje, J. Stover,  Power Spectral Densities: A Multiple Technique Study of Different Si Wafer Surfaces, J. Vac. Sci. Technol, 20, 31-41, 2002

T. V. Vorburger, J. Raja,  Surface Finish Metrology Tutorial, NISTIR 89-4088 (National Institute of Standards and Technology, Gaithersburg, MD, 1990)


This software system was developed at the National Institute of Standards and Technology by employees of the Federal Government in the course of their official duties, pursuant to title 17 Section 105 of the United States Code. Data and descriptions of this software system are not subject to copyright protection and are in the public domain. This software system is an experimental system. NIST assumes no responsibility whatsoever for its use by other parties, and makes no guarantees, expressed or implied, about its quality, reliability, or any other characteristic. We would appreciate acknowledgement if the software is used.


Technical Inquiries: Thomas Brian Renegar
Surface and Nanostructure Metrology Group
Semiconductor and Dimensional Metrology Division
Physical Measurement Laboratory
NIST, 100 Bureau Drive, Stop 8212
Gaithersburg, MD 20899-8212

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Date Created: July 15, 2002
Last Updated: October 22, 2012