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News
- 01/03/2009
- Added six reference surface profiles created by The National Physical Laboratory (NPL), UK.
- Added mean height of profile elements (Pc, Rc, and Wc) parameters to Reference Software for 2D Surface Analysis and 2D Virtual SRM Database.
- Fixed a bug in Sm parameter calculations.
- Changed Default value of Height Discrimination from 10% to +/-5%.
- Added a capability to remember GUI settings when switching from one webpage to another.
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This software system was developed at the National Institute of Standards and
Technology by employees of the Federal Government in the course of their official duties,
pursuant to title 17 Section 105 of the United States Code. Data and descriptions of this software
system are not subject to copyright protection and are in the public domain. This software system is
an experimental system. NIST assumes no responsibility whatsoever for its use by other parties,
and makes no guarantees, expressed or implied, about its quality, reliability, or any other characteristic.
We would appreciate acknowledgement if the software is used.
Technical Inquiries:
Thomas Brian Renegar
Surface and Nanostructure Metrology Group
Semiconductor and Dimensional Metrology Division
Physical Measurement Laboratory
NIST, 100 Bureau Drive, Stop 8212
Gaithersburg, MD 20899-8212NIST
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NIST Program Questions: Public Inquiries Unit,
(301) 975-NIST, TTY (301) 975-8295.
NIST, 100 Bureau Drive, Stop 3460, Gaithersburg, MD 20899-3460
Technical Web Site Questions: Thomas Brian Renegar
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NIST is an agency of the: U.S. Department of Commerce
Date Created: July 15, 2002
Last Updated: October 22, 2012
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