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Acceptable Data Format
The system reads two data formats: ASCII and SDF.
For 2D analysis
For 3D analysis
Under development
===========================================
ASCII Format
The first data point presents data spacing in the x direction and the remaining data
points present height values in the z direction. All data points are expressed in
micrometers.
SDF Format (Surface Data File)
|
Version Number (a: ASCII, b: binary) |
Unsigned Char
|
8
|
| ManufacID |
Manufacturer ID |
Unsigned Char
|
10
|
| Create Date |
Create Date and Time |
Unsigned Char
|
12
|
| ModDate |
Modified Date and Time |
Unsigned Char
|
12
|
| NumPoints |
Number of points in a profile |
Unsigned Int
|
2
|
| NumProfiles |
Number of profiles in a data file |
Unsigned Int
|
2
|
| Xscale |
X-scale. A x-scale value of 1.00 E-6 represents a sample
spacing of 1 micrometer |
Double
|
8
|
| Yscale |
Y-scale. A y-scale value of 1.00 E-6 represents a sample
spacing of 1 micrometer |
Double
|
8
|
| Zscale |
Z-scale. A z-scale value of 1.00 E-6 represents a height of 1 micrometer |
Double
|
8
|
| Zresolution |
Z- resolution |
Double
|
8
|
| Compression |
Compression Type |
Unsigned Char
|
1
|
| Data types |
Data Type (0: unsigned char, 1: unsigned integer, 2: unsigned
long, 3: float, 4: signed char, 5: signed integer, 6 signed long, 7: double) |
Unsigned Char
|
1
|
| CheckType |
Check Sum Type |
Unsigned Char
|
1
|
Z-data values are delimited by asterisks (*). Each height equals the z-values multiplied by the Z-scale value above.
Data Type supported in Data Area
0
|
Unsigned Char
|
1
|
1
|
Unsigned Int
|
2
|
2
|
Unsigned Long
|
4
|
3
|
Float
|
4
|
4
|
Signed Char
|
1
|
5
|
Signed Int
|
2
|
6
|
Signed Long
|
4
|
7
|
Double
|
8
|
Example
aBC-1.0
ManufacID = Sine
CreateDate = 031019971457
ModDate =
031019971457
NumPoints =
8000
NumProfiles = 1
Xscale
= 0.5e-6
Yscale
= 0
Zscale
= 1.0e-10
Zresolution = 0
Compression = 0
DataType = 5
CheckType = 0
*
0
79
157
236
314
393
471
...
...
...
...
-323
-244
-166
-87
0
*
Reference
K. J. Stout, P. J. Sullivan, W. P. Dong, E. Mainsah, N. Lou, T. Mathia
and H. Zahouani, The Development of Methods for The Characterisation of Roughness
in Three Dimensions, Report EUR 15178 EN. EC Brussels, 1993
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This software system was developed at the National Institute of Standards and
Technology by employees of the Federal Government in the course of their official duties,
pursuant to title 17 Section 105 of the United States Code. Data and descriptions of this software
system are not subject to copyright protection and are in the public domain. This software system is
an experimental system. NIST assumes no responsibility whatsoever for its use by other parties,
and makes no guarantees, expressed or implied, about its quality, reliability, or any other characteristic.
We would appreciate acknowledgement if the software is used.
Technical Inquiries:
Thomas Brian Renegar
Surface and Nanostructure Metrology Group
Semiconductor and Dimensional Metrology Division
Physical Measurement Laboratory
NIST, 100 Bureau Drive, Stop 8212
Gaithersburg, MD 20899-8212NIST
| PML
| Semiconductor and Dimensional Metrology Division
NIST Program Questions: Public Inquiries Unit,
(301) 975-NIST, TTY (301) 975-8295.
NIST, 100 Bureau Drive, Stop 3460, Gaithersburg, MD 20899-3460
Technical Web Site Questions: Thomas Brian Renegar
Privacy Policy
| Security Notice
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| Disclaimer
Freedom of Information Act (FOIA)
| Feedback and Comments
NIST is an agency of the: U.S. Department of Commerce
Date Created: July 15, 2002
Last Updated: October 22, 2012
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