Semiconductor and Dimensional Metrology Division Internet-based Surface Metrology Algorithm Testing System
 Internet-based Surface Metrology Algorithm Testing SystemNational Institute of Standards and Technology
 
 Filter
  Gaussian
  Method

  Use Gaussian Window
Using Gaussian width from -Lc/2 to Lc/2
Using Gaussian width from -Lc to Lc

  2RC
  Method

  Cutoff Setting
  Long Cutoff (Lc) mm
 
 Short Cutoff (Ls) µm
 
 


 Surface Parameters
Calculation is based on:
the evaluation length (ASME B46)
all sampling length(s) (ISO 4287)
Ra Rq Rp
Rv Rt Rz
Rsk Rku Rdq
RSm* Rc Rk Family
 Height  Discrimination ± % Rz
 Spacing  Discrimination % sampling length
Calculate Uncertainty
Uz   % Pq
Ux   % spacing
 
 
 

 Analysis Report in Acrobat PDF
 
  
  
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This software system was developed at the National Institute of Standards and Technology by employees of the Federal Government in the course of their official duties, pursuant to title 17 Section 105 of the United States Code. Data and descriptions of this software system are not subject to copyright protection and are in the public domain. This software system is an experimental system. NIST assumes no responsibility whatsoever for its use by other parties, and makes no guarantees, expressed or implied, about its quality, reliability, or any other characteristic. We would appreciate acknowledgement if the software is used.


Technical Inquiries: Thomas Brian Renegar
Surface and Nanostructure Metrology Group
Semiconductor and Dimensional Metrology Division
Physical Measurement Laboratory
NIST, 100 Bureau Drive, Stop 8212
Gaithersburg, MD 20899-8212


NIST | PML | Semiconductor and Dimensional Metrology Division

NIST Program Questions: Public Inquiries Unit,
(301) 975-NIST, TTY (301) 975-8295.
NIST, 100 Bureau Drive, Stop 3460, Gaithersburg, MD 20899-3460
Technical Web Site Questions: Thomas Brian Renegar

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Date Created: July 15, 2002
Last Updated: October 22, 2012