Data
analysis sheet for in-plane
deflection measurements from
released part to fixed location
Figure L.6.1.
Top view of a portion of the pointer
test structure depicting the
measurement to be made.
To obtain the
following measurements, consult ASTM
standard test method E 2244 entitled
"Standard Test Method for In-Plane
Length Measurements of Thin,
Reflecting Films
Using an Optical Interferometer."
date data taken (optional) =
/
/
filename of 2-D data traces
(optional) =
Table 1 - Preliminary
ESTIMATES
Description
1
material =
material
2
displacement =
μm
designed
displacement
3
which?
which iteration of the test structure
where "first" corresponds to the topmost or
leftmost test structure in
the column or array of the same material that has the specified designed displacement?
4
magnification =
×
magnification
5
orientation =
orientation on the chip
6
calx =
x-calibration factor (for the given magnification)
7
interx
=
μm
interferometer's maximum field of view
(for the given magnification)
8
σxcal =
μm
one sigma
uncertainty in a ruler
measurement (for the given
magnification)
9
xres
=
μm
uncalibrated resolution
of the interferometer in the
x-direction
10
calz =
z-calibration factor (for the given magnification)
11
aligned?
alignment ensured ?
12
leveled?
data leveled ?
Table 2 -
INPUTS (uncalibrated values)
Notes
13
x1max
(i.e., x1lower)
=
μm
14
x1min
(i.e., x1upper)
=
μm
(x1min > x1max)
15
x2min
(i.e., x2lower)
=
μm
(x2min > x1min)
16
x2max
(i.e., x2upper)
=
μm
(x2max > x2min)
17
sep
=
μm
uncalibrated
pixel-to-pixel spacing (for the
given magnification)
(Each
of the standard uncertainty
components is obtained using a
Type B analysis.)
Report the results as follows: Since it can be assumed that the
estimated values of the
uncertainty
components are
approximately uniformly
or Gaussianly distributed with
approximate combined standard
uncertainty
ucD, the
in-plane deflection is believed to
lie in the interval D1
±
ucD (expansion factor
k=1) representing a
level of confidence of
approximately 68 %.
Modify the input data, given the
information supplied in any
flagged statement below, if
applicable, then recalculate:
1.
Please
fill
out
the
entire
form.
2.
The designed
displacement is typically 0.0
μm.
3.
The measured
value for D1
is 10 μm greater than the
designed displacement.
4.
Is the
magnification appropriate given
the value for D1
?
5.
Magnifications
at
or
less
than
2.5×
shall
not
be
used.
6.
Is
0.95
<
calx
<
1.05
but
not
equal
to
"1"
?
If
not,
recheck
your
x-calibration.
7.
The
value
for
interx
should
be
between
0
μm
and
1500
μm.
8.
The
value
for
σxcal
should
be
between
0
μm
and
4
μm.
9.
The
value
for
xres
should
be
between
0
μm
and
1.57
μm.
10.
Is 0.95 <
calz < 1.05 but not equal to
"1" ? If not, recheck your
z-calibration.
11.
Alignment
has
not
been
ensured.
12.
Data
has
not
been
leveled.
13.
x1min should be
greater than x1max.
14.
x2min
should be greater than x1min.
15.
x2max
should be greater than x2min.
16.
The
calibrated values for x1min
and x1max are
greater than 10 μm apart.
17.
The
calibrated values for x2min
and x2max are
greater than 10 μm apart.