PML Banner
 Data Analysis Sheet RS.1

Data analysis sheet for residual strain measurements

Top view of fixed-fixed beam used to measure residual strain.

Figure RS.1.1.  Top view of fixed-fixed beam used to measure residual strain.

To obtain the following measurements, consult ASTM standard test method E 2245 entitled
"Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films
Using an Optical Interferometer."


date data taken (optional) = / /
identifying words (optional)   =   
instrument used (optional)   =   
fabrication facility/process (optional)   =   
test chip name (optional)   =    test chip number (optional)   =   
filename of 3-D data set (optional)   =   
filename of 2-D data traces (optional) =
    
    
 

Table 1 - Preliminary ESTIMATES

Description

1 material =  
   
 
     
 
     

material

2 t = μm beam thickness
3 design length = μm

design length

4 design width = μm design width
(needed for test structure identification purposes only)
5 which beam?         
   

  
     
which fixed-fixed beam on the test chip, where "first" corresponds to the topmost fixed-fixed beam in the column or array that has the specified length? 
6 magnification = × magnification
7 orientation = 0° 
90°
other
orientation of the fixed-fixed beam on the chip
8 calx = x-calibration factor (for the given magnification)
9 interx = μm maximum field of view (for the given magnification)
10 σxcal = μm one sigma uncertainty in a ruler measurement (for the given magnification)
11 xres = μm uncalibrated resolution of the interferometer in the x-direction
12 calz = z-calibration factor (for the given magnification)
13 cert = μm certified value of physical step height used for calibration
14 σzcal = μm standard deviation of step height measurements (on double-sided physical step height)
15 zres = μm calibrated resolution of the interferometer in the z-direction
16 Rtave = μm calibrated peak-to-valley roughness of a flat and leveled surface of the sample material calculated to be the average of three or more measurements, each measurement of which is taken from a different 2-D data trace
17 aligned?      alignment ensured ?
18 leveled?      data leveled ?
19 stiction?      Is this fixed-fixed beam exhibiting stiction ?  
(
If it is exhibiting stiction, do not fill out the remainder of this form.)


     
                                     


Table 2 - INPUTS (uncalibrated values from Trace "a" or "e")

Notes

20 x1max (i.e., x1upper) = μm  
21 x1min (i.e., x1lower)  = μm (x1min > x1max)
22 x2min (i.e., x2lower)  = μm (x2min > x1min)
23 x2max (i.e., x2upper) = μm (x2max > x2min)
 

Table 3 - INPUTS (uncalibrated values from Trace "b")

Notes

24 x1F = μm z1F = μm (x1ave < x1F  calx)
25 x2F = μm z2F = μm (inflection point)
( x1F < x2F < x3F )
26 x3F = μm z3F = μm (most deflected point) 
( x1S = x3F ; z
1S = z3F )
27 x2S = μm z2S = μm (inflection point)
28 x3S = μm z3S = μm ( x3S  calx < x2ave )
( x1S < x2S < x3S )

Table 4 - INPUTS (uncalibrated values from Trace "c")

Notes

29 x1F = μm z1F = μm (x1ave < x1F  calx)
30 x2F = μm z2F = μm (inflection point)
( x1F < x2F < x3F )
31 x3F = μm z3F = μm (most deflected point)
( x1S = x3F ; z1S = z3F )
32 x2S = μm z2S = μm   (inflection point)
33 x3S = μm z3S = μm   ( x3S  calx < x2ave )
( x1S < x2S < x3S )

Table 5 - INPUTS (uncalibrated values from Trace "d") 

Notes

34 x1F = μm z1F = μm (x1ave < x1F  calx)
35 x2F = μm z2F = μm   (inflection point)
( x1F < x2F < x3F )
36 x3F = μm z3F = μm (most deflected point)
( x1S = x3F ; z1S = z3F )
37 x2S = μm z2S = μm  (inflection point)
38 x3S = μm z3S = μm ( x3S  calx < x2ave )
( x1S < x2S < x3S )

                                      

OUTPUTS (calibrated values):
   
        
x1ave μm            x2ave μm
             L     
μm
 
                        Lmax = ( x2max x1max ) calx
                         Lmin = ( x2min
x1min ) cal
x
                         uLL  =  ( Lmax Lmin ) / 6 = 
μm
                         uLxcal  = ( σxcal / inter
x )( L / calx ) = μm
                         uLxres  = xres cal
x / 1.732 =  μm
             u
cL   =  
SQRT[uLL2 + uLxcal2 + uLxres2]  μm
             s         
           from Trace "c"
                         s = 1       (for downward bending fixed-fixed beams)
                         s =
−1     (for upward bending fixed-fixed beams)

                             AF    μm      from Trace "b"
                            w1F      
        from Trace "b"
                             AS  
μm      from Trace "b"
                           w3S   =              
from Trace "b"

             xeF   
μm            from Trace "b"
             xeS   
μm   
         from Trace "b"
           
 εr0    × 10-6       from Trace "b"
             εr     =    
× 10
-6       from Trace "b"

                             AF    μm      from Trace "c"
                           w1F            
   from Trace "c"
                             AS  
μm      from Trace "c"
                           w3S   =            
  from Trace "c"

             xeF   
μm             from Trace "c"
             xeS   
μm             from Trace "c"
            
εr0    × 10-6        from Trace "c"
             εr    =    × 10-6        from Trace "c"                  (USE THIS VALUE)
                         usamp    =    × 10-6     from Trace "c"
                         uW    =    
× 10-6          from two or three traces
                         uxcal    =  
 × 10-6       from Trace "c"
                         uL    =    
× 10-6           from Trace "c"
                         uzcal    =    
× 10-6       from Trace "c"
                         uzres    =    
× 10-6       from Trace "c"
                         uxres    =    
× 10-6       from Trace "c"
                         uxresL    =    
× 10-6     from Trace "c"

             ucer    
= SQRT[usamp2 + uW2 + uxcal2 + uL2 + uzcal2 + uzres2 + uxres2 + uxresL2]
              
        (Each of the standard uncertainty components is obtained using a Type B analysis.)
             ucer    =    × 10-6        from two or three traces

                             AF    μm      from Trace "d"
                           w1F       
        from Trace "d"
                             AS  
μm      from Trace "d"
                           w3S   =             
 from Trace "d"

             xeF   
μm             from Trace "d"
             xeS   
μm             from Trace "d"
             εr0    = 
× 10
-6        from Trace "d"
              εr     =    
× 10
-6        from Trace "d"

Report the results as follows:  Since it can be assumed that the estimated values of the uncertainty
components are approximately uniformly or Gaussianly distributed with approximate combined standard
uncertainty ucer
, the residual strain is believed to lie in the interval er ± ucer (expansion factor k=1)
representing a level of confidence of approximately 68 %. 


Modify the input data, given the information supplied in any flagged statement below, if applicable, then recalculate:
1. Please fill out the entire form.
2.   The value for t should be between 0.000 μm and 10.000 μm.
3.   The value for the design length should be between 0 μm and 1000 μm. 
4.   The measured value for L is more than 3ucL from the design length.
5. The value for the design width should be between 0 μm and 60 μm.
6. Is the magnification appropriate given the design length ?
7. Magnifications at or less than 2.5× shall not be used.
8. Is 0.95 < calx < 1.05 but not equal to "1"?  If not, recheck your x-calibration.
9.   The value for interx should be between 0 μm and 1500 μm.
10.   The value for σxcal should be between 0 μm and 4 μm.
11.   The value for xres should be between 0 μm and 2.00 μm.
12. Is 0.95 < calz < 1.05 but not equal to "1" ?  If not, recheck your z-calibration.
13.   The value for cert should be greater than 0 μm and less than 25 μm.
14. The value for σzcal should be between 0 μm and 0.050 μm.
15. The value for zres should be greater than 0 μm and less than or equal to 0.005 μm.
16. The value for Rtave should be between 0 μm and 0.100 μm.
17. Alignment has not been ensured.
18. Data has not been leveled.
19. x1min should be greater than x1max.
20. x2min should be greater than x1min.
21. x2max should be greater than x2min.
22. The calibrated values for x1min and x1max are greater than 10 μm apart.
23. The calibrated values for x2min and x2max are greater than 10 μm apart.
24. In Traces "b," "c," and "d," the value for s is not the same.
25. x1ave should be < (x1F  calx) in all traces.
26. (x3S  calx) should be < x2ave in all traces.
27. In all traces, make sure ( x1F < x2F < x3F ).
28. In all traces, make sure ( x1S < x2S < x3S ).
29. For Trace "b," | [(x2F  calx) − xeF ] | = μm.  This should be < 5 μm.
If it is not, choose (x
2F, z2F) such that (x2F  calx) is closer to xeF = μm.
30. For Trace "b," | [(x2S calx) − xeS ] | μm.  This should be < 5 μm.
If it is not, choose (x
2S, z2S) such that (x2S calx) is closer to xeS = μm.
31. For Trace "c," | [(x2F calx) − xeF ] | = μm.  This should be < 5 μm.
If it is not, choose (x
2F, z2F) such that (x2F calx) is closer to xeF = μm.
32. For Trace "c," | [(x2S calx) − xeS ] | =  μm.  This should be < 5 μm.
If it is not, choose (x
2S, z2S) such that (x2S calx) is closer to xeS = μm.
33. For Trace "d," | [(x2F calx) − xeF ] | μm.  This should be < 5 μm.
If it is not, choose (x
2F, z2F) such that (x2F calx) is closer to xeF = μm.
34. For Trace "d," | [(x2S calx) − xeS ] | μm.  This should be < 5 μm.
If it is not, choose (x
2S, z2S) such that (x2S calx) is closer to xeS = μm.

Return to Main MEMS Calculator Page.

Email questions or comments to mems-support@nist.gov.

NIST is an agency of the U.S. Commerce Department.
The Semiconductor and Dimensional Metrology Division is within the Physical Measurement Laboratory.
The MEMS Measurement Science and Standards Project is within the Nanoscale Metrology Group.

Date created: 12/4/2000
Last updated: 4/26/2013